Highly Sensitive MEMS Based Capacitive Pressure Sensor Design Using COMSOL Multiphysics & Its Application in Lubricating System
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Engineering and Applied Sciences
سال: 2017
ISSN: 2575-2022
DOI: 10.11648/j.eas.20170204.12